Semiconductor and Technology Videos

The Award Winning Silicon Run Video Series

The First Video in the
MEMS and Nanotechnology Trilogy

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MEMS: MAKING MICRO MACHINES is an overview of the manufacture and design of microelectromechanical systems. This video shows the fabrication, testing and packaging, and design of some of our most common MEMS devices. It features the fabrication of Hewlett-Packard’s thermal inkjet printhead and covers the testing and packaging of Texas Instrument’s digital micromirror devices. At Freescale Semiconductor we delve into the design process with a look at the creation of their sensors.

Running Time: 42 minutes

"I had the pleasure of watching MEMS: Making Micro Machines and found it a great educational tool for industry and academia alike. The interplay between the animation and real live scenarios provides an extraordinary view of MEMS technology."

Major funding was provided by the National Science Foundation. Partial funding is from Freescale Semiconductor, Robert Bosch GmbH, and SEMI.

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• Micro Fluidics
• MEMS Mechanical and Electrical Components
• Fabrication Process of the Thermal Inkjet Printhead
• Surface and Bulk Micromachining
• Packaging and Testing of DMD Devices
• Using Spring Tip Extensions to Overcome Stiction
• Design Process Flow
• Pressure Sensors
• Inertial Sensors (Accelerometers and Gyroscopes)

• New Silicon Run Film, MEMS: Making Micro Machines, Provides Inside Look at MEMS Manufacturing
• Micromanufacturing magazine article